

![]() |
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|---|---|---|---|
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Single | Czochralski | |
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Boron(P-type) | ||
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0.5 ~ 6.0 | ohm-cm | |
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<100>±3 | deg | |
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10 | μsec | |
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0.5E+18 | atoms/㎤ | |
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1.0E+18 | atoms/㎤ | |
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3000 | ea/㎤ | |
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Quasi-square | ||
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200±30 | ㎛ | |
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156±0.5 | ㎜ | |
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200±1.0 | ㎜ | |
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50 | ㎛ | |
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70 | ㎛ | |
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70 | ㎛ | |
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None | ||
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None | ||
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None | ||
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None | ||
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20 | ㎛ |
